X-Y Air bearing axis system

Air-bearing 2 axis system:

Bearing: Air-bearin on X and Z axis

Basic structure : Ground steel

Peak force: X Axis: 16800N, Z Axis: 9840N

Measuring system:

-Repeatability: ± 0,5 μm

-Resolution : 100nm mit Safety

Repeatability Linearaxis: ± 3 μm

Max.Speed: 1 m/s

Max. Acceleration: 130 m/s2