Achssystem mit Luflager

Product information of this special project with X-Y linear motor stage system with air bearings

Air-bearing 2 linear motor stage system:
Bearing: Air-bearin on X and Z axis
Basic structure : Ground steel
Peak force: X Axis: 16800N, Z Axis: 9840N
Measuring system:
-Repeatability: ± 0,5 μm
-Resolution : 100nm mit Safety
Repeatability Linearaxis: ± 3 μm
Max.Speed: 1 m/s
Max. Acceleration: 130 m/s2
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